主要特性 | AWM42150VH | AWM42300V | AWM43300V | AWM43600V |
流量范圍(滿量程) | ±25 sccm | ±1000 sccm | +1000 sccm | +6 SLPM |
輸出電壓@標(biāo)定點(diǎn) | 8.5mV±1.5mV @25 sccm | 54.7mV±3.7mV DC @1000 sccm | 5V±0.15VDC @1000 sccm | 5V±0.15VDC @6 SLPM |
零點(diǎn)電壓 | 0.0±1.0mVDC | 0.0±1.5mVDC | 1.0±0.05VDC | 1.0±0.05VDC |
零點(diǎn)電壓漂移,典型值 | ±0.20mVDC | ±0.20mVDC | ±0.025VDC | ±0.025VDC |
輸出電壓漂移,值 | ±2.5% Reading 典型值 | ±2.5% Reading 典型值 | ±6.0%Reading 典型值 | ±6.0%Reading 典型值 |
功耗(mW) | 60(值) | 60(值) | 60(值) | 75(值) |
重復(fù)性&遲滯 | ±0.35% Reading | ±0.50% Reading | ±0.50% Reading | ±1.0% Reading |
壓降@滿量程(英寸水柱) | 0.008(典型值) | 1.02(典型值) | 1.02(典型值) | 8.0(典型值) |
最小值 | 典型值 | 值 | 單位 | |
激勵(lì)電壓(VDC) | 8.0 | 10.0±0.01 | 15 | VDC |
響應(yīng)時(shí)間 | 1.0 | 3.0 | ms | |
標(biāo)定氣體 | 氮?dú)?/td> | |||
比率誤差 | ±0.3%讀數(shù) |