型號描述

型號 8713 是一臺用于調(diào)節(jié)氣體質(zhì)量流量的裝置，適合工藝技術(shù)領(lǐng)域內(nèi)大多數(shù)的用途。在數(shù)字的電子調(diào)節(jié)設(shè)備中，會將以硅芯片為基礎(chǔ)的傳感器（參見第 2 頁的描述）提供的數(shù)值，與規(guī)定的額定值進(jìn)行比較；存在調(diào)節(jié)偏差時(shí)，會通過一種 PI 調(diào)節(jié)算法對發(fā)送到比例閥上的調(diào)節(jié)參數(shù)進(jìn)行修改，由此補(bǔ)償調(diào)節(jié)偏差。因?yàn)閭鞲衅髦苯犹幱跉饬髦?，所以設(shè)備的反應(yīng)時(shí)間非常短。質(zhì)量流量可以保持在一個確定的數(shù)值上，或遵循規(guī)定的額定值曲線輪廓，而不會受到壓力波動或設(shè)備中其他變化的影響。

1）采用 CMOSens® 技術(shù)的直接流量測量裝置，適合額定流量范圍 20 mlN/min 至 80 lN/min (N2)
2）高精度
3）反應(yīng)快速
4）緊湊型結(jié)構(gòu)和數(shù)字通訊

Type Description

The mass flow controller (MFC) type 8713 is suited for regulating the mass flow of gases over a big flow range. The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8713 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed. The mass flow controller type 8713 fits for various applications, like e.g. burner controls, heat treatment, material coatings, bio reactors, fuel cell technology or test benches.

1）Nominal flow ranges from 0.010 lN/min to 80 lN/min
2）High accuracy and repeatability
3）Very fast settling times
4）Digital communication via RS485
5）Compact version

氣體質(zhì)量流量控制器部分訂貨號如下：

667530 KOMP-800-8713-G667-530-00-