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LAM 713-006653-001 RING, BACKUP TEFLON (PACK OF 10)
LAM 713-006654-001 WASHER WIPER RETAINER TEFLON
LAM 713-010222-001 GUAGE, BASE GAP
LAM 713-010222-002 CAL TOOL
LAM 713-011049-003 SHIELD, WINDOW UV DUAL MONOCHROM
LAM 713-011049-005 SHIELD WINDOW UV SOLO FILEER
LAM 713-011049-006 SHIELD, WINDOW UV DUAL FILTER
LAM 713-011415-001 CLAMP, LOADCOIL
LAM 713-011578-003 SLEEVE PLUNGER GUIDE
LAM 713-011585-001 COVER, CLAMP BOLT (PACK OF 10)
LAM 713-011585-001 COVER, CLAMP BOLT (PACK OF 10)
LAM 713-011585-004 COVER CLAMP BOLT
LAM 713-011666-006 RING,FOCUS/SLEEVE COMBO
LAM 713-011802-001 CLAMP
LAM 713-011802-001 CLAMP
LAM 713-011885-001 TUBE, 8" PREFORMED KEL-F
LAM 713-011924-002 SLIT,WINDOW
LAM 713-011980-001 PLUNGER HOUSING,FOCUS RING
LAM 713-012157-001 SPACER HUB
LAM 713-012546-001 COLL HOSE
LAM 713-0130-1 AIRLOCK, GATE STOP
LAM 713-013215-001 COVER ENTRANCE TUNNEL
LAM 713-013464-003 COVER, SAFETY BOWL
LAM 713-013488-001 NOZZLE BLOCK MOUNTING LEFT
LAM 713-013489-001 NOZZLE BLOCK MOUNTING RIGHT
LAM 713-015159-001 PLATE,LOAD COIL
LAM 713-017165-001 CLAMP RF CONNECTOR (RH)
LAM 713-017166-001 CLAMP RF CONNECTOR (LH)
LAM 713-017510-001 PANEL, MEMBRAIN KEYBOARD
LAM 713-017510-001 PANEL, MEMBRAIN KEYBOARD
LAM 713-017687-001 MANF,SRC CLNG WTR,SPLY,2300 MW
LAM 713-018624-302 RING, FOCUS, 6"
LAM 713-020911-001 PLUNGER, WAFER CLAMP
LAM 713-021105-002 SPACER, WAP D-SHP TAPERED PEEK
LAM 713-021267-101 PIN, CLAMP ALIGNMENT HEAD
LAM 713-025079-002 BLK,INSUL & TC MNT,L TEM
LAM 713-025086-002 PAD INSUL
LAM 713-027192-002 NUT, 1/4-20 WAP PEEK
LAM 713-027394-002 HANGER, 1/4-20 WAP PEEK
LAM 713-027396-001 WASHER, FLAT 1/4 WAP PEEK
LAM 713-028230-001 SLEEVE BANA JACK
LAM 713-028281-001 RING CONFINEMENT
LAM 713-028553-002 RING, CONFINEMENT, VESPEL
LAM 713-029022-001 SLEEVE PLUNGER
LAM 713-029100-001 PLUNGER, WAFER CLAMP
LAM 713-029101-001 RETAINER WAFER CLAMP
LAM 713-031777-001 SCREW, COVER
LAM 713-031777-001 SCREW, COVER
LAM 713-043116-001 RING, SHROUD ALLIANCE
LAM 713-043116-001 RING, SHROUD ALLIANCE
LAM 713-044035-001 WINDOW, QUARTZ VIEW PORT 9100
LAM 713-071134-001 CAP, INSULATOR
LAM 713-071355-001 CAP TARGET MTG SCR
LAM 713-071621-002 CAP, INSULATOR, HORN MTG, 17.5MM
LAM 713-071659-001 INSULATOR, SCR, HORN MTG
LAM 713-071671-004 PLUG, ISLN HORN
LAM 713-071963-001 PLUG, TGT, IN- SITU
LAM 713-073065-001 COOL DOWN COVER (F6)
LAM 713-080573-001 COV,TOP,RE575T,SK10
LAM 713-21580-1 COVER,INSULATOR
LAM 713-21581-1 BASE,INSULATOR
LAM 713-21721-1 CLAMP,LOWER
LAM 713-220525-001 WINDOW ULPA FILTER
LAM 713-240548-001 ELETD, PTCTR ESC
LAM 713-240548-001 ELETD, PTCTR ESC
LAM 713-250067-001 ROD SUPPORT FLAG
LAM 713-250585-001 ISOLATOR TEFLON GAS FEED THRU UPPER ELECTRODE
LAM 713-330153-003 ROD ADJUSTABLE CLAMPING
LAM 713-330166-001 CLAMPING ROD COVER
LAM 713-330374-001 WINDOW, SHIELD UV ENDPOINT
LAM 713-330374-002 SHLD,WDO,UV,DUAL HTD
LAM 713-330407-001 BRACKET LATCH RIGHT
LAM 713-330461-001 TCP COIL END CAP(713-330461-001)
LAM 713-347386-001 BLOCK
LAM 713-4056-001 COVER LEXAN
LAM 713-4108-1 PLUG, VENT, TEFLON
LAM 713-432006-001 COVER, MESC SIDE, ALLIANCE
LAM 713-432007-001 RETAINER, FIBER
LAM 713-460778-001 PLT,CONN MTG,UPR MATCH,CLD GDP
LAM 713-540138-001 PLATE
LAM 713-540183-002 RING, LOWER PEEK (PACK OF 10)
LAM 713-540183-002 RING, LOWER PEEK (PACK OF 10)
LAM 713-803052-001 INSERT, GAS-INTRFMTR
LAM 713-8060-1 STANDOFF GAS FEED
LAM 713-L012527-001 VACUUM, CUP LOAD POINT
LAM 713-S014180-001-03 PLATE, TEFLON
LAM 714-001313-001 SUPPORT BRACKET
LAM 714-011072-001 BRACKET SWITCH LIMIT
LAM 714-011124-001 RING HEATER GAP ADJUST
LAM 714-011222-001 SCREEN VACUUM PORT
LAM 714-011861-001 HEATSHIELD END POINT DET
LAM 714-012242-001 LATCH INNER DOOR
LAM 714-013227-004 PLATE, CONN, BLANKOFF
LAM 714-014615-008 PNL,FRT,GEN,CT,OEM,12A,OEM,650
LAM 714-015003-001 COVER
LAM 714-015055-002 COVER, UPPER, MATCH REMOVE
LAM 714-015063-002 CONN PL, UPR FD-THRU BOX ASSY
LAM 714-015079-002 COVER INTERLOCK SWITCH
LAM 714-015134-001 CONDUCTOR,GROUND
LAM 714-019489-002 PLT.CLG MTG.2300 MWAVE
LAM 714-019956-001 BRKT,MANF,PLT.CLG MTG 2300 MWA
LAM 714-021304-001 COVER
LAM 714-021836-001 ENCLOSURE, FAN, OUTER
LAM 714-022007-001 COV,BTM.CIOM ENCL.2300 MWAVE
LAM 714-022009-001 COV,SIDE,ENCL.2300 MWAVE
LAM 714-022241-001 COV,DI VME,DC SPRT
LAM 714-024512-101 COVER SOLENOID TRAY
LAM 714-024512-101 COVER SOLENOID TRAY
LAM 714-024512-103 COVER, CA TRAY
LAM 714-024513-100 ENCL, SOLENOID TRAY
LAM 714-025051-002 CVR MTCHBOX EXT ESC
LAM 714-025958-001 SUPPORT PLATE
LAM 714-028527-001 TCP M/C MATCHER COI
LAM 714-031054-002 RETAINER UNVERSAL WDO
LAM 714-032003-004 COV,BOT,LWR MTCH ENCL,A6
LAM 714-032029-001 COV,ELEK CMPNT,FRONT
LAM 714-075327-001 MILAN FIBER TWIST MODEL MILI140 CONVERTOR
LAM 714-110249-002 PL, CLP, DBL, SLD
LAM 714-110863-001 STRAP,TWR CASE P.C B/H &WLMT
LAM 714-140242-001 STANDOFF GAS FEED 2 1/2LG
LAM 714-140259-001 STRP,GROUND
LAM 714-170128-001 BRACKET
LAM 714-190320-002 SUPPORT BRACKET
LAM 714-220204-001 RGA PORT SUPPORT
LAM 714-220204-001 RGA PORT SUPPORT
LAM 714-220748-003 VENT, 4" EXHAUST
LAM 714-222405-001 SCRN, EMI, SOL TRAY COV
LAM 714-222984-001 PL,MTG,MONOCHROMATOR
LAM 714-249190-001 HGR,LWR MATCH BOX
LAM 714-249342-001 STRAP CNTOR ESC 150MM
LAM 714-330356-001 SCREEN, RF SHIELD HEAED E.P.
LAM 714-347271-001 SHIELD
LAM 714-386008-001 COV,DIP BOX/TEMP CONT
LAM 714-443235-002 PL,MTG,BICEP PWR SPLY
LAM 714-460562-002 COVER, ELCTD HSG ESC
LAM 714-460564-002 COVER, VIA LOWER ELCTD HSG ESC
LAM 714-470572-001 VENT MOUNT
LAM 714-491416-002 BRKT,MTG,RF CONT ENCL,TALL
LAM 714-491925-001 BRKT,ENCL,XFMR,A/T
LAM 714-494492-002 COV,PCB,LWR MATCH RF INTLK
LAM 714-495015-001 COVER
LAM 714-800097-004 ENCL,AC CONT
LAM 714-802247-002 COV, RF GEN
LAM 714-810225-001 COV,PCB,NODE,DUAL V
LAM 715-000001-001 CHAMBER LOAD LOCK
LAM 715-000015-002 MOUNT BASE LOAD LOCK EXIT
LAM 715-000028-002 BOTTOM PLATE
LAM 715-000102-001 PIN DOOR GATE LINKAGE IN/OUT (PACK OF 10)
LAM 715-000185-001 COUPLING
LAM 715-000764-002 PL,LIFT,3-PIN
LAM 715-000764-002 PL,LIFT,3-PIN
LAM 715-000764-703 PL,LIFT,3PIN,2300
LAM 715-00131-001 HOUSING TEMPERATURE CONTROL
LAM 715-001388-001 ACTUATOR FOOT
LAM 715-001408-001 5"ANODIZED CATHODE
LAM 715-0015-001 BASE MOUNT OUT/DOOR
LAM 715-001626-001 SUPPORT, PCT DRIVE RF
LAM 715-002041-002 GEAR PHASE CAP
LAM 715-002054-001 SHAFT, EXIT LIFTER
LAM 715-002570-001 CHAMP,FLANGE,LONG
LAM 715-003573-003 PL,OPTICAL CONN
LAM 715-004042-001 ANODE
LAM 715-005865-001 PLATE TOP 490
LAM 715-006436-001 BARRIER ION ANODIZED
LAM 715-006584-001 GEAR SPUR MOIFIED
LAM 715-006590-001 SPINDLE, LL, FEEDTHRU
LAM 715-006590-001 SPINDLE, LL, FEEDTHRU
LAM 715-006602-001 HOUSING SEAL QUALRIM
LAM 715-007514-001 SPACER BRAKE
LAM 715-007528-001 FLANGE, MOUNT, GATE DRIVE CYLINDER
LAM 715-009128-005 ELECTRODE PLATE (715-9128-005)
LAM 715-009161-001 LIFTER, WAFER
LAM 715-009306-004 FOCUS RING
LAM 715-009306-005 FOCUS RING
LAM 715-009898-001 EDGE RING 5
LAM 715-0102-1 PIN,
LAM 715-010202-001 PLATE,JACKING SCREW
LAM 715-010213-002 TOOL CAL EDGE SNSR, 1.49
LAM 715-010237-006 DISC CALIBRATION APM
LAM 715-011005-001 HOUSING-GAP ADJUST
LAM 715-011016-001 HINGE,BOTTOM,CHAMBER
LAM 715-011035-001 PLATE, HEX, LOWER, RE
LAM 715-011039-001 RETAINER-WINDOW
LAM 715-011039-002 RETAINER UNIVERSAL WINDOW
LAM 715-011039-004 RETAINER, HEATED E.P. WINDOW
LAM 715-011051-001 FRAME, CHAMBER, WINDOW
LAM 715-011051-001 FRAME, CHAMBER, WINDOW
LAM 715-011059-001 RING ORIFICE ANNODIZED
LAM 715-0111173-001 CALIBRATION FLAG FOR GAP
LAM 715-011126-001 BRACKET ENCODER
LAM 715-011213-001 PLATE, VENT PORT 90DEG LOADLOCK
LAM 715-011214-001 PLATE VENT PORT 180DEG
LAM 715-011229-003 PLATE, SEAL, EXIT LOADLOCK
LAM 715-011420-001 PLATE
LAM 715-011492-005 HOLDER WAFER 5"
LAM 715-011502-001 COOLING RING
LAM 715-011504-001 BAFFLE, UPPER
LAM 715-011521-001 BRACKET POU GAS FILTER
LAM 715-011531-009 ELECTRODE, ANODIZED
LAM 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED
LAM 715-011531-014 ELECTRODE, AL, UPPER
LAM 715-011531-014 ELECTRODE, AL, UPPER
LAM 715-011531-016 UPPER ELECTRODE
LAM 715-011531-102 ELECTRODE, UPPER, ANOD
LAM 715-011532-006 (R)PLATE UPPER SEAL
LAM 715-011559-262 WAFER CLAMP
LAM 715-011565-001 BOLT, CLAMP RETAINING
LAM 715-011565-003 BOLT
LAM 715-011570-001 SHIELD
LAM 715-011582-001 BAFFLE PLATE, LOWER AL
LAM 715-011590-001 PLATE,LOWER BAFFLE 6
LAM 715-011593-002 PLATE,SEAL,4420
LAM 715-011597-001 5MIL ELECTRODE AL AN
LAM 715-011613-002 BAR, STOP
LAM 715-011626-001 RING, COOLING LOWER ELECTRODE
LAM 715-011630-001 ELECTRODE , BOTTOM
LAM 715-011630-001 ELECTRODE , BOTTOM
LAM 715-011639-008 CAP, ELECTRODE, LOWER, 4400
LAM 715-011639-508 CAP, LWR, ROUGH, 858STR
LAM 715-011640-006 RING, AL-ANDZ LWR FOCUS ELCTD
LAM 715-011664-006 ELCTRD, LWR CAP, 6-IN NO ANDZ FLAT AL
LAM 715-011665-006 ANODE
LAM 715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL
LAM 715-011746-142 PLATE, 4" .010 DOME REDUCED HGT
LAM 715-011823-001 ROD-MECHANICAL STOP 8.50
LAM 715-011825-001 LOWER CHAMBER PLATE
LAM 715-011858-001 PLATE WINDOW END POINT DET
LAM 715-011902-001 BAFFLE PLATE
LAM 715-011909-501 ELECTRODE, SI, CAPTIVE
LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858
LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858
LAM 715-011913-083 PLATE, BAFFLE LOWER
LAM 715-011913-083 PLATE, BAFFLE LOWER
LAM 715-011913-501 BAFFLE, LOWER
LAM 715-011913-555 BAFFLE, LOWER, 4420,STR,858
LAM 715-012025-001 SPACER 0-RING
LAM 715-012101-008 HOLDER,W/F 8",ARM EXIT
LAM 715-012111-002 COVER ARM HSG (CABLE DRIVE)
LAM 715-012126-001 TUBE ARM DRIVE
LAM 715-012165-005 5"HOLDER WAFER 5" TIGHT POC
LAM 715-012165-008 ARM, TIGHT POCKET ELL
LAM 715-012223-001 SHAFT GROVVED INNER PLATE
LAM 715-012233-002 GATE-HARD ANODIZE INNER
LAM 715-012243-001 BLOCK LATCH
LAM 715-012245-001 PIVOT, GATE, INNER
LAM 715-012251-001 BAR LATCH SOLENOID RELEASE
LAM 715-012254-001 BEARING, LATCH SOLENOID RELEASE
LAM 715-012322-001 OUTER DOOR FOR GATE DRIVE
LAM 715-013295-001 HSG,ADJ, WFR LIFT
LAM 715-013477-001 PLATE, MOUNTING
LAM 715-013718-006 CHUCK SPINNER 6"
LAM 715-013718-016 ASSY ELECTRODE
LAM 715-013772-001 COLLAR PINNED LIFTER 6"(462
LAM 715-014074-002 BLOCK MTG , GAS NOZZLE
LAM 715-014556-031 GASKET,ORIFICE
LAM 715-015092-001 BLOCK,THREADED,SEED
LAM 715-015216-001 TUBE ADAPTER
LAM 715-0166-001 CYLINDER, ARM-AIR
LAM 715-018611-117 CAP, LWR, ELECTRODE, 8"
LAM 715-018906-002 ELECTRODE, BOTTOM, BELLOW
LAM 715-018917-001 HOLDER,W/F CLAMP(462
LAM 715-018991-006 ELECTRODE, ALUMINUM, ANODIZED
LAM 715-019939-002 TUBE,MANF TO MCRWV SOURCE
LAM 715-019940-002 TUBE,MANF FROM MCRWV SOURCE
LAM 715-019942-002 TUBE,MANF TO MCRWV VLVE FROM G
LAM 715-019943-001 TUBE,MANF TO TEE FROM CHMBR
LAM 715-019944-004 TUBE,VLV TO TEE TO CHMBR
LAM 715-019945-002 TUBE,VLV TO CHMBR
LAM 715-021092-001 SPACER
LAM 715-021274-008 CAP, LOWER ELECTRODE 8IN
LAM 715-021400-002 COVER, 180 DEG LOADLOCK, P.S. MOD
LAM 715-021507-1 CONNECTOR,MALE,VCR,MOD.
LAM 715-021719-001 COVER BELL JAR ISO ETCH
LAM 715-024347-100 PLATE,SPRT,V65,V65A,V75,V75A
LAM 715-025106-001 PLATE- LOWER BAFFLE, ESC
LAM 715-028087-005 SHROUD HARD ANODIZED
LAM 715-028420-001 CAP, L ELECTRODE FLAT PROCESS
LAM 715-028486-001 PLATE UPPER SEAL 6' ELECTRODE
LAM 715-028559-001 SHOWER HEAD 6" 4620
LAM 715-028616-001 PLATE LOWER BAFFLE 8" BOLTED
LAM 715-028620-001 PROBE, THERMAL WELL
LAM 715-028735-001 TRIPPLE BAFFLE, UPPER 852
LAM 715-028852-001 RING,CLAMP UPPER
LAM 715-030079-001 DISC. CLAMP
LAM 715-030106-006 EDGE RING
LAM 715-030106-008 RING, EDGE. 8"
LAM 715-030136-003 RING, EDGE ESC
LAM 715-031023-001 SPATULA EXIT SIDE 9600 SMIF
LAM 715-031055-001 BLK, HTD ENDPOINT
LAM 715-031513-002 RING, 1/4 TURN
LAM 715-031705-006 SPACER, SHIELD, RF
LAM 715-031753-001 ELECTRODE
LAM 715-031753-001 ELECTRODE
LAM 715-031777-002 SCREW 6-32 CPV ANODIZED
LAM 715-031960-007 PLUNGER,1/4 TURN (ANODIZED)
LAM 715-031984-003 ENDPLATE, SMALL WINDOW CHAMBER
LAM 715-031988-001 PLATE,FOR TURBO,MANOMETER SIDE
LAM 715-032012-003 PLATE, WINDOW, CHAMBER LGR
LAM 715-032012-004 END POINT WINDOW ASSY
LAM 715-032758-002 EXT ARM,PADDLE SPHERE BR G PLTD
LAM 715-032789-001 COV, TK, WTR VAPOR DLVY SY
LAM 715-038611-002 DC, BIAS PIN HOLDER
LAM 715-06213-001 SHOWER HEAD
LAM 715-062533-002 CH, CLP, COMPL, CLOS
LAM 715-072302-001 PUMP, COMPOND MOLECULAR
LAM 715-0725-001 CATHODE ANODIZED
LAM 715-07898-001 FOOT
LAM 715-080387-001 ARM, WAFER, XPORT, UNIV, 6IN, 384T
LAM 715-080554-001 PL,MT,U,ESC,ASIQ/384T
LAM 715-090184-001 SCREW, SOCKET HEAD ARM (PACK OF 10)
LAM 715-110336-002 PLATE, OUTER, GATE, SEAL
LAM 715-11059-001 RING, ORFICE
LAM 715-110709-001 PLATE, ADAPTER
LAM 715-110765-001 MTG R,AUTOTUNE 4520,L BRKT
LAM 715-11504-001 PLATE PERF ALUMINUM
LAM 715-11531-002 SHOWER HEAD
LAM 715-11629-006 LOWER CAP ELECTRODE 6"
LAM 715-11649-002 BOLT, ORIFICE RING
LAM 715-11901-005 PLATE
LAM 715-12254-001 BEARING, LATCH SOLENOID RELEASE
LAM 715-140079-001 PLATE, SEAL, UPPER ELECTRODE, 4600
LAM 715-140099-001 ESC WATER JACKET
LAM 715-140124-001 BAFFLE, UPPERTPL SET
LAM 715-140125-001 BAFFLE, LOWER OF THREE
LAM 715-140126-001 BAFFLE, TPL SET
LAM 715-140144-002 RING, CPLG, LVLG, EXP, 6, JDA
LAM 715-140153-008 RING, COUPLING, ESC 8", JDA
LAM 715-140287-001 RING,CLMP,UPR,ELECTRODE
LAM 715-140350-010 LOWER ELECTRODE CAP
LAM 715-14042028 ELECTD,AL,ANDZ,8 INCH
LAM 715-140421-026 ELECTRODE ALUMINUM 6"
LAM 715-140485-006 ELCTD (SPCL), AL, ANDZ, 6
LAM 715-160153-002 PLT MTG AUTOTUNE MATCH
LAM 715-2007-001 PIN, HINGE
LAM 715-220249-001 BRACKET, COOLING LINE, HOLD DOWN
LAM 715-220438-002 SLEEVE,FILTER,GAS FEED
LAM 715-220438-002 SLEEVE,FILTER,GAS FEED
LAM 715-222451-003 SHUTTER ARM
LAM 715-24349-100 PLATE SUPPORT
LAM 715-249241-001 SCR,GDE,LWR ELCTD,ESC
LAM 715-250544-001 GRID GROUND W/15MM HOLES FOR 9500
LAM 715-28681-001 SEAL PLATE
LAM 715-28686-001 SEAL PLATE
LAM 715-28686-002 SEAL PLATE
LAM 715-30079-001-1 TOOL, DISK CLAMP
LAM 715-300825-006 LINER, CHAMBER
LAM 715-330000-070 RING GAS INJECTION
LAM 715-330000-090 RING, GAS DISTRIBUTION
LAM 715-330000-090 RING, GAS DISTRIBUTION
LAM 715-330087-001 GAS INJECTION RING
LAM 715-330092-002 COV, NUT, BOT GAS FD W/O SLOT
LAM 715-330133-001 RING UPPER CHAMBER FIXED GAP
LAM 715-330135-001 R, BOT GAS INJ, ESC
LAM 715-330151-004 RING,ACTR
LAM 715-330152-003 SPRING ADJUSTABLE HOUSING
LAM 715-330161-002 SHLD RING
LAM 715-330161-002 SHLD RING
LAM 715-330164-006 ADJUSTMENT PLATE
LAM 715-330166-003 COV, ROD, CLPG, AL, B.A.C. (PACK OF 3)
LAM 715-330302-001 SEAL GAS FEED REAR
LAM 715-330312-001 RING, RETAINING CLIP
LAM 715-330354-002 BLK,HTD ENDPOINT
LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM
LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM
LAM 715-330773-001 LID ASSEMBLY
LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I
LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I
LAM 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE
LAM 715-360268-001 PL,CHMBER TO VLV
LAM 715-4042-001 ANODE, 8"
LAM 715-412298-001 STUD, HOLD DOWN, 1/2-13X10.0, STL
LAM 715-412472-001 SPCR,MON,ALLI 6
LAM 715-42859-001 FIXTURE CENTERING RETICLE
LAM 715-442006-001 RING, RETAINER, O-RING
LAM 715-443098-001 RING, CLP, UPPER ELECRTRODE
LAM 715-443130-001 RING FOCUS OUTER AL EXELAN
LAM 715-443130-001 RING FOCUS OUTER AL EXELAN
LAM 715-443131-001 RING, GROUNDING ALUM
LAM 715-443178-202 R,EDGE,HOT,8FLAT
LAM 715-443202-001 RING, COUPLING, ESC, JEIDA, 8
LAM 715-460552-002 LINER, CHAMBER LOWER 9100/A6
LAM 715-460553-002 LINER, CHAMBER UPPER 9100/A6
LAM 715-460559-004 PIN, SUPPORT HTD LNR HASLOY
LAM 715-460578-001 LIFTER, WAFER 4-PIN
LAM 715-461022-001 R, CLG, ESC, UNIV
LAM 715-470821-001 PL,MTG,V,AIR OPR,GAS PALLET
LAM 715-495014-001 LINER,CHAMDER,TRNSN MANF,ADPTR
LAM 715-540057-001 TEE
LAM 715-626-1 LIFTER PISTON
LAM 715-654-1 LIFTER PISTON END
LAM 715-6602-1 HOUSING ARM SHAFT
LAM 715-666-1 LIFTER LOWER PISTON
LAM 715-802530-001 PL,ADAPT,DN200,VLV TO CHMBR
LAM 715-803220-001 SHLD,GND,DFC,300MM
LAM 715-803220-003 SHLD,GND,DFC,300MM
LAM 715-9034-1 LIFTER TOP PLATE
LAM 715-L011123-001 PLATE, CLAMP BOWL NUT
LAM 715-L011125-001 SPROCKET
LAM 715-L011628-001-00 DIVDER, FLOW
LAM 715-L011649-002 BOLT ORIFICE RING
LAM 715-L011914-001 RING, FILLER UPPER ELECTRODE,NIT
LAM 715-S010416-001 WET PINS
LAM 715-S031752-001-00 PLATE, BAFFLE UPPER NIT
LAM 715-S031754-001-00 PLATE, BAFFLE LOWER NIT
LAM 716-001163-001 RING, WAP2&3 10.35 ELECTRODE FUSED QTZ
LAM 716-001700-001 QUARTZ WINDOW
LAM 716-001835-001 INSULATOR GAP H0USING
LAM 716-001981-001 PLUNGER, LWR WFT CLAMP, KEL-F LCH
LAM 716-002483-188 INSR, FOC R, AL 203, FL, 200MM
LAM 716-003687-188 INSERT, FOCUS RING 200MM
LAM 716-003773-001 RING, WAP4 TWIST-N-LOK
LAM 716-005204-001 RING, WAP1 SMALL 10.35 ELECTRODE QTZ
LAM 716-005205-003 PLATE, COVER STEP QTZ
LAM 716-007136-001 RING, QUARTZ, UPPER, HP
LAM 716-011009-001 QUARTZ WINDOW
LAM 716-011036-001 RING, FILLER, LOWER
LAM 716-011057-002 RING,FILLER,UPPER
LAM 716-011543-003 PLATE, CER W/C ATTACHMENT
LAM 716-011563-162 CLAMP, 6-IN DOMED 1.5-MM
LAM 716-011563-168 DOMED WAFER CLAMP 6
LAM 716-011564-003 UPPER ELECTRODE
LAM 716-011573-004 PLUNGER-1/4 TURN 4420/9600
LAM 716-011623-001 RING CLAMP LOWER ELECTRODE
LAM 716-011623-001 RING CLAMP LOWER ELECTRODE
LAM 716-011624-001 RING, LOWER INSULATOR
LAM 716-011624-001 RING, LOWER INSULATOR
LAM 716-011624-005 RING,INSUL,ELEC,RDCD,HGT
LAM 716-011638-005 RING FOCUS THIN EDGE
LAM 716-011643-001 RING, CER INSUL LWR ELECTRD
LAM 716-011651-005 RING, ENDGE WAGER CLAMP 5.00
LAM 716-011651-006 RING,EDGE,WAFER,CLAMP 6.00"
LAM 716-011651-006 RING,EDGE,WAFER,CLAMP 6.00"
LAM 716-011671-001 CLAMP RETAINER 1/4 T
LAM 716-011683-008 FOCUS RING
LAM 716-011750-151 5"RING INSERT
LAM 716-011830-006 FOCUS RING,6" ALUMINA W/C
LAM 716-011830-008 RING, FOCUS (ALUMINA) 8" WAFER CLAMP
LAM 716-011889-161 CLAMP, WAFER 6
LAM 716-011909-504 PL, UPR, ELCTD, POLISH, 8 IN
LAM 716-011922-001 PLATE
LAM 716-011923-001 PLATE,WFR,CLAMP,ATTACH
LAM 716-011963-003 PLATE, CLAMP ATTACHMENT
LAM 716-011999-281 PLATE,LWR WAFER CLAMP,8''
LAM 716-012640-003 QUARTZ PLATE
LAM 716-013731-001 APM, LIFTER PAD
LAM 716-013935-118 INSR,BAFL, UV SHLD, 2300 MW ST
LAM 716-015098-001 INSULATION ELBOW LOWER MATCH
LAM 716-015597-001 RING, COVER WAP DFC 200 MM QTZ
LAM 716-016830-002 RING, WAP TWIST TOP STEP QTZ
LAM 716-016831-002 RING, WAP GENERIC QUARTZ
LAM 716-018527-426 PALTE WAFER CLAMP 8"
LAM 716-018527-430 PLATE,WAFER,CLAMP,8",.050
LAM 716-018897-001 RING INSULATOR 6"(46
LAM 716-018900-001 RING COLLED LEFT ELECT PROC. II
LAM 716-018993-001 RING EDGE 6" 4620
LAM 716-020904-018 RING FOCUS, EDGE, 1PC
LAM 716-020904-018 RING FOCUS, EDGE, 1PC
LAM 716-020905-001 RING, FILLER, BOTTOM, CLAMP
LAM 716-020906-161 CLAMP RING,DOMED W/PINS, PLATE WFR, BOT
LAM 716-020909-001 RING
LAM 716-020923-002 RING LAM COLIMATING 6-1D
LAM 716-020931-030 PLUNGER, 1/4 TURN
LAM 716-021323-001 QUARTZ FUNNEL- 8"
LAM 716-021492-001 DIRECTOR, PROCESS GAS
LAM 716-021857-001 SEAL HARMONIC ARM POST (PACK OF 10)
LAM 716-021884-001 GASKET DUCT AIR COOLED ISO
LAM 716-021894-001 BASKET, BELL JAR CLAMP, LOWER
LAM 716-027963-001 RING, WAP GENERIC
LAM 716-027967-001 RING, WAP TWIST TOP
LAM 716-028033-001 INSUL ELECT CAP PROCESS II EIP
LAM 716-028123-002 CLAMP
LAM 716-028123-002 CLAMP
LAM 716-028123-003 RING LAM FILLER CERAMIC 6-4C
LAM 716-028249-061 RING, 6" ESC
LAM 716-028249-064 RING,FOCUS,CER,LWR,MJR FLAT,9600SE
LAM 716-028414-018 RING, FOCUS
LAM 716-028447-002 DISK CERAMIC
LAM 716-028454-015 DISK,QUARTZ
LAM 716-028492-001 SLEEVE, CERAMIC THERMAL PROBE
LAM 716-028492-002 SLEEVE, CERAMIC
LAM 716-028605-402 CONFINEMENT RING
LAM 716-028688-281 PLATE, LWR WAFER CLAMP, 8" SHADOW
LAM 716-028688-281 PLATE, LWR WAFER CLAMP, 8" SHADOW
LAM 716-028688-581 CLAMP,WAFER,SHADOW NOSE
LAM 716-028721-262 CLAMP, SHADOW, CERAMIC
LAM 716-028721-268 CLAMP, PLT, WAFER JEDA
LAM 716-028739-001 CERAMIC SLEEVE
LAM 716-028740-001 BAFFLE,PLATE,9600,6"
LAM 716-029435-006 RING
LAM 716-030136-001 R, EDGE 6" ESC, MJR FL
LAM 716-031453-002 RING FILLER LOWER CHAMBER
LAM 716-031535-001 RING,CLAMP,BOT,ELETD,ESC.OX
LAM 716-031535-002 RING, CLMP, BOT, CER ESC
LAM 716-031635-002 WINDOW,STEPPED CE
LAM 716-032065-001 PLATE WAFER CLAMP
LAM 716-032119-003 QTZ BAFFLE
LAM 716-032760-008 COLLAR PINNED LIFTER 8"
LAM 716-038612-002 PIN PICK UP,DC BIAS SI CARB
LAM 716-051054-001 QTZ SHIELD SECTION, TOP PLATE
LAM 716-052017-003 SHIELD, QUARTZ QUAD, EP
LAM 716-05733-005 RING CERAMIC
LAM 716-05773-004 RING CERAMIC
LAM 716-071637-003 PLATE ISLN HORN
LAM 716-071975-001 DIFFUSER, FLNG ISO
LAM 716-072287-001 WINDOW,MICROWAVE,QUARTZ
LAM 716-11505-001 DIFFUSER CATHODE, 8"
LAM 716-11505-001 DIFFUSER CATHODE, 8"
LAM 716-11653 FILM, KAPTON .002 MICRON
LAM 716-140068-001 RING,FOCUS,ESC,6"
LAM 716-140139-211 RING,HOT EDGE,HI WALL,ESC 8"
LAM 716-140163-261 RING, HOT EDGE, 15 IN
LAM 716-140238-061 RING, UPPER, 6 IN
LAM 716-140349-010 FOCUS RING 8"
LAM 716-160170-001 WINDOW,QTZ DSQ HNG
LAM 716-1999-1 WINDOW, REAR
LAM 716-20904-018 FOCUS RING
LAM 716-249093-001 PLUG SAPPHIRE 9500 ESC
LAM 716-250514-001 CLAMP-GAS INLET UPPER ELECTRODE CERAMIC
LAM 716-28028-004 RING, LOWER, INNER, CERAMIC
LAM 716-330004-008 RING,FOCUS,HI-COND,ESC,8"
LAM 716-330004-008 RING,FOCUS,HI-COND,ESC,8"
LAM 716-330045-004 FOCUS RING
LAM 716-330045-005 R,EDGE, PH1 ESC, SEMI, 6
LAM 716-330045-262 R,EDGE,6",JEIDA,ESC
LAM 716-330068-001 CERAMIC PLATE
LAM 716-330122-002 PLATE TOP CERAMIC
LAM 716-330162-002 RING, FILLER, B.A.C.
LAM 716-330167-188 RING,CLAMP,BOT,ACTR,1.5,8"JEIDA
LAM 716-330167-261 BOTTOM CLP RING
LAM 716-330352-001 INSULATOR HEATED END POINT
LAM 716-330890-001 SHADOW RING
LAM 716-330890-006 RING CONTAINMENT, 6-IN-CHMBER, DOGDISH
LAM 716-330891-002 QUARTZ WINDOW
LAM 716-330915-001 INSUL, ESC 9600
LAM 716-331099-001 R, EDGE, 6", FL, TOP, QTZ
LAM 716-331142-005 RING, TOP WIDE EDGE
LAM 716-331142-302 R,EDGE,TP5MM,STP-300MM
LAM 716-440054-109 PLATE, FOCUS RING ADAPTOR CERA
LAM 716-440345-261 RING, CLAMP
LAM 716-440345-281 CLAMP,CERAMIC,WAFER,SHADOW
LAM 716-441044-004 QUARTZ PLATE
LAM 716-442005-001 WINDOW, PORT SENSOR XPRT CHMBR
LAM 716-443083-004 RING QTZ UPPER CONFINE CIP BIG HOLES
LAM 716-443090-002 RING, QTZ, UPR
LAM 716-460579-001 LINER, CERAMIC VIEW INSERT 9100/A4
LAM 716-460758-001 LINER, CERAMIC VIEW PORT
LAM 716-460785-007 PLATE, COOL GDP 10 HOLE
LAM 716-460916-001 RING, SILICON CARBIDE INNER 9100
LAM 716-460954-002 OUTER COVER,CMPST,FOC,RSIN6,JEIDA
LAM 716-461271-003 BAFFLE,CERAMIC,MW,STPR,AIN
LAM 716-494919-001 INS CER,HTD LNR,TOP MNT
LAM 716-494968-001 LINER, EXTENDED HEATED CERAMIC
LAM 716-800951-001 BASE, FOCUS RING 200MM
LAM 716-801451-112 BAFFLE,CHBR,2300 MW STRIPPER,A
LAM 716-L011009-001-00 WINDOW, QTZ
LAM 716-S012502-001-00 NEOSERAM
LAM 716-S070938-002-01 ELECTRODE, PRESSURE
LAM 718-025279-002 MOD,VALVE,BACK PRESSURE WATER
LAM 718-030066-002 SCREEN VENT STRIPPER
LAM 718-071761-001 VIEWPORT, SAPPHIRE, MOD CF4
LAM 718-094756-081 ELECTRODE, ESC UPPER GRAFIT
LAM 718-34255-001 HEATER, WVDS
LAM 720-000930-006 SCR, SCH CAP, 6-32 X 3/8" LG, SST (PACK OF 10)
LAM 720-000930-008 SCREW
LAM 720-000930-032 SCREW
LAM 720-000932-004 SCR, FLAT HD
LAM 720-000940-004 SCREW
LAM 720-000940-008 SCREW (PACK OF 10)
LAM 720-000940-012 SCREW SCR,SCHCAP,8-32
LAM 720-000950-006 SCREW (PACK OF 10)
LAM 720-001002-003 SCREW,PNH,PH,8-32,3/16
LAM 720-001002-004 SCREW
LAM 720-094702-012 SCREW,SOCKET HEAD CAP 8-32*(3/4)
LAM 720-252387-001 SCREW, SHAPED WINDO
LAM 721-000936-001 WASHER FLT #6 SST
LAM 721-000936-002 WSHR, LK, #6 (PACK OF 10)
LAM 721-000946-001 WASHER, FLAT, #8 (PACK OF 10)
LAM 721-000956-003 WASHER STAR #10
LAM 721-009937-001 PWM8EDC
LAM 722-000938-001 NUT, HEX, 6-32
LAM 722-000948-001 NUT, HEX, 8-35
LAM 722-000958-001 NUT, HEX, 10-32 (PACK OF 10)
LAM 722-000966-002 NUT, HEX, JAM, 1/4-20
LAM 722-007855-003 NUT
LAM 722-090514-00 NUT, NYLON W/WASHER (PACK OF 10)
LAM 723-006595-001 SPACER ARM SHAFT PRECISION N/C (PACK OF 10)
LAM 723-008913-001 SPACER ARM SHAFT PRECISION N/C (PACK OF 10)
LAM 723-550450-001 SPACER,BEARING
LAM 724-S012529-001-00 KNOCKOUT, PIN
LAM 726-006594-001 RING ARM SHAFT RETAINING (INTERNAL) N/C (PACK OF 10)
LAM 726-007499-003 CLAMP SPLIT HUB .313 SHAFT
LAM 726-090515-001 RING LOCKING (PACK OF 10)
LAM 728-061064-020 SCR. SOC HD, M5X8 SST
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