型號：GSL-1700X-HVC9
產(chǎn)品概述：GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.
| Furnace Structure | · Double layer steel casing with air cooling. · Two cooling fans inside to keep case temperature < 55oC. · 內(nèi)爐膛表面涂有美國進口的高溫氧化鋁涂層可以提高設(shè)備的加熱效率，同時也可以延長爐膛的使用壽命 · High purity Alumina refractory chamber · · Vacuum and gas mixing system is located in bottom cart with 4 wheel. · Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use. |
| Power | 6 Kw |
| Voltage | AC 208-240V Single Phase, 50/60 Hz |
| Heating Element | 8?pcs1800oC grade MoSi2 heating element |
| Max. Temperature | 1650 oC (< 2hours )（更新時間：19.12.10--JS2） |
| Continuous Temperature | 1600 oC |
| Max. Heating Rate | ≤5 oC /min |
| Tube Size and Materials | Premier Grade alumina tube made in USA. （標(biāo)配尺寸） ( 60mm) O.D.x I.D. (54mm) x 1000mm Length · · （選配尺寸） ( 80mm) O.D.x I.D. (74mm) x 1000mm Length · · Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details). |
| Heating Zone | Heating zone length: 457 mm (18") · · Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注：由于測量手段及外部環(huán)境的影響，測量結(jié)果可能會有偏差，此參數(shù)僅供參考不作為該設(shè)備的技術(shù)指標(biāo)。您購買產(chǎn)品需要準(zhǔn)確的恒溫區(qū)數(shù)據(jù)，請與我公司銷售人員聯(lián)系 |
| Temperature controllers | One precision digital temperature controller programmable with 50 segments. · · PID adjustable with auto tune function to ensure temperature stability within +/- 1 oC. · · 控溫儀表操作視頻 · · Full protection in each controller for over-temperature and broken thermal couple. |
| Thermal Couple | B type thermal couples built in |
| Vacuum Flanges | · Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve. · Double high temperature silicone O-ring for using under 300oC. Porous alumina blocks included for protecting flange from heat radiation. |
| Vacuum pumps | Tow stages vacuum pump installed in bottom case: · OneDouble Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr. · · One turbo molecular pump with max. vacuum pressure of 2x10-5 torr. One precision vacuum sensor installed. · · Stainless steel hose tube is included for connecting to tube furnace. · · Digital vacuum meter / controller installed. |
| Vacuum Sensor & display | Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display. · · Vacuum controller and display areinstalled in bottom cart.
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| Gas flow meter User Manual?(Click to download) | · 9 precision mass flow meters (CS200) controllers are installed in bottom cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-99% of full scale) · 3 MFC at range 0 - 1000scc · 3 MFC at range 0 - 200scc · 3 MFC at range 0 - 10 scc · one floating meter will be installed for N2 gas only · one mechanical pressure meters are installed in bottom cart for monitor each gas 's pressure in mixer. · 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
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| Pipe connection, valves and gas mixer | · SS 316 1/4" pipe/fitting · SS 316 vacuum needle valves · 21 sets of stainless steel vacuum valves are installed outside of right side panel of cabinet to control, vacuum pump, flowing gases and two inlet gases separately. Please click here to see sketch of pipe connection.
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| Dimension | Furnace: 550 x 380 x 520 Bottom case: 600x600x597 |
| Net Weight | about 100 kg |
| Shipping weight | 200 Lbs |
| Shipping package size after crating | Two cases in one plastic pallet: 45x45x35/case |
| Warranty & certificate | One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) · ·
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