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The performance capability of the UVISEL Spectroscopic Phase Modulated Ellipsometers can be extended with the integration of the VIP Spectroscopic Reflectometer.
The accuracy of phase modulated ellipsometer is useful in the 1st phase of R&D and process development where the determination of absolute values of physical parameters (eg film thickness, optical data, composition) ａnd film structures (eg surface roughness, interface, gradient, anisotropy) are crucial to create the necessary performance of the final device.
And in the 2nd phase of quality control of production processes, the VIP spectroscopic reflectometer is able to provide very fast and reproducible control of thickness, optical constants and reflectivity properties of thin films and patterned materials as small as 10µm.
Advanced automation features for use in production environments include precision motorized sample stage, high speed autofocus and robust pattern recognition software.
The UVISEL VIP is controlled by the DeltaPsi2 software platform that is common to all HORIBA Jobin Yvon thin film metrology tools. The engineer mode of the software provides ellipsometric and reflectometric data acquisition, modelling and reporting capabilities. Fully automatic thin film analysis are performed via push-button recipes. Results include display of mapping on semiconductor wafer and glass panels, statistical analysis of data, import/export package function, and data reprocessing capabilities.
The UVISEL VIP is the ideal thin film metrology platform for process development and industrial quality control for demanding photovoltaic, FPD, semiconductor, flexible electronics and optoelectronic applications.
The performance capability of the UVISEL Spectroscopic Phase Modulated Ellipsometers can be extended with the integration of the VIP Spectroscopic Reflectometer.
The accuracy of phase modulated ellipsometer is useful in the 1st phase of R&D and process development where the determination of absolute values of physical parameters (eg film thickness, optical data, composition) ａnd film structures (eg surface roughness, interface, gradient, anisotropy) are crucial to create the necessary performance of the final device.
And in the 2nd phase of quality control of production processes, the VIP spectroscopic reflectometer is able to provide very fast and reproducible control of thickness, optical constants and reflectivity properties of thin films and patterned materials as small as 10µm.
Advanced automation features for use in production environments include precision motorized sample stage, high speed autofocus and robust pattern recognition software.
The UVISEL VIP is controlled by the DeltaPsi2 software platform that is common to all HORIBA Jobin Yvon thin film metrology tools. The engineer mode of the software provides ellipsometric and reflectometric data acquisition, modelling and reporting capabilities. Fully automatic thin film analysis are performed via push-button recipes. Results include display of mapping on semiconductor wafer and glass panels, statistical analysis of data, import/export package function, and data reprocessing capabilities.
The UVISEL VIP is the ideal thin film metrology platform for process development and industrial quality control for demanding photovoltaic, FPD, semiconductor, flexible electronics and optoelectronic applications.
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