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英國RenishawXL-80激光測量系統(tǒng)新型RenishawXL-80激光測量系統(tǒng)為坐標(biāo)測量機(jī)和機(jī)床等運(yùn)動(dòng)系統(tǒng)提供高性能精度校準(zhǔn)

詳細(xì)介紹

英國Renishaw XL-80激光測量系統(tǒng)

英國RENISHAW XL-80

新型Renishaw XL-80激光測量系統(tǒng)為坐標(biāo)測量機(jī)和機(jī)床等運(yùn)動(dòng)系統(tǒng)提供高性能精度校準(zhǔn)。

XL-80系統(tǒng)快速、精確、非常輕便，保留了Renishaw ML10在日常使用中所表現(xiàn)出的高精度、可靠性和耐用性等重要優(yōu)點(diǎn)。XL-80與的軟件解決方案和優(yōu)異的性能相結(jié)合，可以提高貴公司的經(jīng)營業(yè)績。

XL-80激光干涉儀的主要優(yōu)點(diǎn)

Renishaw設(shè)計(jì)、制造和供應(yīng)激光系統(tǒng)已有二十多年的歷史。XL－80是這些設(shè)計(jì)和制造豐富經(jīng)驗(yàn)的結(jié)晶，具有真正的系統(tǒng)性能和操作優(yōu)點(diǎn)。

便攜性和易用性 XL-80激光和XC－80補(bǔ)償器體積小巧，一套完整的線性測量系統(tǒng)裝在一個(gè)“便攜箱"中，重量僅12公斤。再加一個(gè)三腳架（裝入尼龍拉鏈攜帶箱中），您就有了一個(gè)真正便攜的機(jī)器測量方案。激光和補(bǔ)償器均可通過USB與PC機(jī)連接，因此無需單獨(dú)的接口，也無需擔(dān)心復(fù)雜的設(shè)定。
精度和動(dòng)態(tài)性能精確穩(wěn)定的激光源和準(zhǔn)確的環(huán)境補(bǔ)償，保證了±0.5 ppm的線性測量精度。讀數(shù)以50 kHZ頻率讀取，線性測量速度可達(dá)4 m/s，即使在速度下線性分辨率仍可達(dá)1 nm。所有測量選項(xiàng)（不僅是線性）都采用干涉儀測量，使您對記錄數(shù)據(jù)的精度有信心。
使用方便 XL-80設(shè)定和使用快速簡便，減少了等待時(shí)間，增加了用于測量的時(shí)間，同時(shí)保留了純粹干涉測量系統(tǒng)精度高的優(yōu)點(diǎn)。
全面信心優(yōu)質(zhì)揑設(shè)計(jì)、惂憿榓媄術(shù)巟帩惀Renishaw揑標(biāo)巙惈摿惇。不管測量的是微米還是納米，的設(shè)施和質(zhì)量保證都極為重要。標(biāo)準(zhǔn)的三年保修期和支持網(wǎng)絡(luò)體現(xiàn)了我們對您的承諾。

激光校驗(yàn)機(jī)器的優(yōu)點(diǎn)

提高機(jī)器的正常運(yùn)行時(shí)間
ML10 Laser application 不管使用哪種機(jī)器或運(yùn)動(dòng)系統(tǒng)，在開始切削或加工材料或測量部件之前，您都需要知道設(shè)備運(yùn)行是否正常。您可以了解機(jī)器定位性能的每個(gè)特性隨時(shí)間發(fā)生變化的詳細(xì)情形，預(yù)測某特定機(jī)器何時(shí)需要維修并預(yù)先建立應(yīng)急計(jì)劃。

提告機(jī)器性能
通過有針對性的維護(hù)和誤差補(bǔ)償，Renishaw的性能測量設(shè)備可確實(shí)提升機(jī)器的性能。

增強(qiáng)對機(jī)器或加工能力的了解
使用適合工作要求的機(jī)器 — 把工作安排給能夠達(dá)到公差要求的機(jī)器，確保機(jī)器適合工作要求并且廢品率較低。

證明機(jī)器性能
當(dāng)客戶需要對您的機(jī)器質(zhì)量或工藝樹立信心時(shí)，校準(zhǔn)曲線和定期性能評估結(jié)果將是證明。它們能夠賦予您寶貴的競爭優(yōu)勢，使您于那些沒有進(jìn)行這些測試的制造商。

符合質(zhì)量保證規(guī)程和標(biāo)準(zhǔn)
ISO 9000系列質(zhì)量標(biāo)準(zhǔn)要求采用的、可溯源的系統(tǒng)和方法對生產(chǎn)和檢測設(shè)備進(jìn)行校準(zhǔn)、監(jiān)視和控制。

提供專業(yè)的維護(hù)服務(wù)
高質(zhì)量的售后服務(wù)。在用戶現(xiàn)場使用與系統(tǒng)原始制造商在其工廠內(nèi)使用的相同校準(zhǔn)工具進(jìn)行校準(zhǔn)，這是使機(jī)器恢復(fù)為制造商原始規(guī)格的方法。

XL系統(tǒng)組件

XL-80 system diagram The basis of the new system is a compact laser head (XL-80) and an independent environmental compensator system (XC-80). A tripod and stage may also be required depending upon the application.

Together with measurement optics and software they form a highly accurate measurement and analysis system that can be stored and transported in one of the optional custom designed storage/transport cases.

XL-80 laser unit

XL-80 Laser unit The XL-80 laser produces an extremely stable laser beam, with a wavelength that is traceable back to national and international standards.

Laser frequency stability ±0.05 ppm over 1 year and ±0.02 ppm over 1 hour is achieved by dynamic thermal control of the laser tube length to within a few nanometres.
Linear measurement accuracy ±0.5 ppm over the whole environmental range ie, from 0 ºC - 40 ºC (32 ºF - 104 ºF) and 650 mbar - 1150 mbar. Readings can be taken at up to 50 kHz, with a maximum linear measurement speed of 4 m/s and a linear resolution of 1 nm; even at maximum speed.
Integrated USB means there is no requirement for a separate laser-to-PC interface.
LED status lights indicate the laser status and signal strength, providing a convenient alternative to the software’s “on-screen" indicators.
Switchable between standard (40 m) and long (80 m) range modes.
Analogue I/O port allows for analogue signal output ａnd a trigger signal input.
Warm-up time is less than 6 minutes.
External, switch mode power supply ensures 90 V - 264 V flexibility in input voltage.

All of the above features make the XL-80 quick and easy to use.

Class II laser safety label In accordance with (IEC) EN60825-1, Renishaw XL-80 lasers are Class 2 lasers and safety goggles are not required. Always refer to the system manual for safety details before operating the system for the first time.

XC-80 compensator and sensors

The XC-80 compensator is a crucial factor in your XL system’s linear measurement accuracy. Featuring “intelligent sensors" that process the readings at source, the compensator very accurately measures air temperature, air pressure and relative humidity. Changes in these conditions can effect the wavelength of the laser light and the measurement readings taken.

The XC-80 uses the sensor readings to modify the nominal value of the laser wavelength to give a true value, which is then used in calculations to virtually eliminate any measurement errors resulting from these variations.

If you are interested in accuracy you NEED effective wavelength compensation.

Key features of XC-80 include:

Uniform compensation - The design of the XC-80 and sensors ensures uniform and extremely accurate readings over the full range of environmental operating conditions.
Frequent sensor updates - This can be done automatically every seven seconds, as indicated by LED status lights on the XC-80 unit.
Integrated USB - The inetgral USB connection means there is no separate PC interface ａnd no separate power supply (the USB supplies the XC-80 and sensors' power).
Lightweight - The XC-80 weighs 550 g, and together with the XL-80, weighs just over 3 kg (including connecting cables, XL power supply and sensors).
Intelligent air and material temperature sensors - The integral microprocessors analyse and process the sensor's output before sending digital temperature values to the XC-80 compensator. This offers more secure measurements and is a key reason why the XC-80 is so compact and also ensures sensors are fully interchangeable without comprimising accuracy.
Up to three material temperature sensors can also be attached to the XC-80 compensator to allow linear measurements to be normalised to a standard material temperature of 20 °C.
Versatile sensor cables - The standard 5 m long sensor cables are detachable for easy replacement and can be screwed together for extended lengths on longer machines.

Note: Environmental compensation is NOT required for angular or straightness measurements when using a Renishaw system as these are calculated from differences in two beam paths close together, where the environmental factors self cancel. As rotary axis, flatness and squareness measurements are also based on these measurements they also do not require environmental compensation.

Tripod and stage

Unless you are using a dedicated measurement rig, then you are likely to need a mounting stage (ａnd in most cases a tripod) to adjust the laser’s position relative to the desired measurement axis.

The XL mounting stage allows for precise angular rotation and translation of the XL-80. It is designed to be left attached to the laser unit for easy storage and quick set-up.
A "quick fit/release" mechanism enables rapid and secure fixing to a tripod. For those applications where tripod mounting is not convenient, e.g. for mounting directly on a machine tool table, the stage and laser can also be mounted on to most standard magnetic bases, using an optional adapter with M8 thread.
The new Universal tripod has been extensively tested to provide a stable, adjustable base in a compact, lightweight unit.

性能和測試

Laser calibration bench All of Renishaw's experience in metrology and laser interferometry is to be found in each and every measurement system that it produces. Our aim is to deliver the specified accuracy, with full traceability and confidence that the laser system will continuously deliver that accuracy day-after-day where it counts, in the workplace.

All lasers and ballbars are calibrated at the Renishaw factory against reference systems with traceability to national standards.

System performance

XL-80, XC-80 and sensors

Performance specifications are verified to international procedures against a documented system error budget, with system accuracy quoted to 95% confidence level (k = 2), which is valid across the full environmental operating range.

Without reliable and accurate wavelength compensation, errors of 20 ppm - 30 ppm would be common. Great effort has been taken to ensure Renishaw’s XC-80 compensation system and sensors are accurate across the entire operating range of the system. It is this that maintains ±0.5 ppm linear measurement accuracy from 0 ºC - 40 ºC (32 ºF - 104 ºF) and over the full air pressure range.

Linear measurement range	80 metres
Linear measurement accuracy	±0.5 ppm
Linear frequency accuracy (1 year)	±0.05 ppm
Resolution	1 nm
Maximum travel velocity	4 m/s
Dynamic capture rate	10 Hz - 50 kHz *
Preheat time	< 6 minutes
Specified accuracy temperature range	0 °C - 40 °C
Storage temperature range	-25 °C to +70 °C

Environmental sensor performance

Sensor	Range	Accuracy
Material temperature	0 °C - 55 °C	±0.1 °C
Air temperature	0 °C - 40 °C	±0.2 °C
Air pressure	650 mbar - 1150 mbar	±1 mbar
Relative humidity (%)	0 - 95% non condensing	±6% RH

* Choose one of 12 pre-defined capture rates.

XL-80所用的測量光學(xué)鏡組

Optic family Renishaw measurement optics enable you to measure linear, pitch, yaw, horizontal and vertical straightness along any axis. Additional optic kits are available to enable measurement of surface flatness and squareness of axis.

The same optics can be used with XL-80 or ML10 systems, ensuring consistency of measurement set-ups and procedures. All measurements are interferometric and therefore use the traceable international standard wavelength of laser light, allowing you to have total confidence in the results.

For rotary axis calibration, please see RX10 rotary axis calibration section and for other optical accessories to assist in set-up and measurement, please see the optics accessories section.

Features and benefits

Interchangeable - The unique design of linear, angular and straightness optics enables easy interchange for different measurements, without having to re-align the laser.

Convenient - Moving optics have no cables to drag or snag, for best accuracy and convenience.

Low mass aluminium optics - The optics are manufactured in aluminium, therefore the optics' low mass is especially relevant if measuring pitch errors on horizontal arm CMMs and for dynamic measurements.

Quick acclimatisation - Some competitor systems use stainless steel optic housings. These are much heavier than Renishaw's aluminium optics and have a lower thermal conductivity, therefore taking longer to acclimatise to the shop environment.

Linear measurement optics kit

Linear measurement optics kit Linear measurement is by far the most common form of measurement performed on a machine.

Each linear measurement optics kit contains:

1 linear interferometer
2 linear retroreflectors and clamp screws
2 alignment targets

Part number	Description
A-8003-0440	Linear measurement optics kit

Specification

Standard range	0 m - 40 m (0 in - 1600 in)
System accuracy (when used with XL-80 system)	±0.5 ppm (parts per million)
(when used with ML10 Gold Standard)	±0.7 ppm
(when used with ML10, pre-Gold Standard)	±1.1 ppm
Resolution	0.001 µm (0.1 µin)
Maximum velocity	4 m/s (9600 in/min)
Velocity measurement accuracy	±0.05%

For linear measurements over 40 m you will require the long range linear accessory kit

Angular measurement optics kit

Angular measurement optics These optics allow angular pitch and yaw measurements to be made. Can measure maximum angular deflections of up to ±10° with resolution of 0.01 arc sec.

Each angular measurement kit contains:

1 angular retroreflector
1 angular interferometer
2 alignment targets

Part number	Description
A-8003-0441	Angular measurement optics

Specification

Axial range	0 m - 15 m (0 in - 590 in)
Angular measurement range	±175 mm/m (±10°)
Angular accuracy	±0.6%* ±0.5 ±0.1M µ/mm (±0.6%* ±0.1 ±0.007F arc sec)
Resolution	0.1 µm/m (0.01 arc sec)

Where:
% = percentage of displayed value
M = measurement distance in metres
F = measurement distance in feet

* 0.2% accuracy available by special order

Linear and angular combination kit

Angular and linear optics This optics combination kit is a cost saving alternative for users who wish to perform both linear and angular measurements.

Each combination kit contains:

1 linear retroreflector and clamp screws
1 angular retroreflector
1 angular interferometer
3 alignment targets

Part number	Description
A-8003-2774	Linear and angular optics combination kit

Straightness measurement optics kit: 0.1 - 4 m axis length

SR straightness These optics allow the measurement of horizontal straightness error in linear axes up to 4 m in length to be made. They also enable axis parallelism to be measured.

Each short range straightness kit contains:

1 straightness interferometer
1 straightness reflector

Part number	Description
A-8003-0443	Straightness optics - short range

Specification

Axial range	0.1 m - 4 m (4 in - 160 in)
Straightness measurement range	±2.5 mm (±0.1 in)
Accuracy	±0.5% ±0.5 ±0.15M² µm (±0.5% ±20 ±0.5F² µin)
Resolution	0.01 µm (1 µin)

Where:
% = percentage of displayed value
M = measuring distance in metres
F = measuring distance in feet

May require Universal (straightness) shutter or straightness accessory kit, depending upon application (see optics accessories section)

Straightness measurement optics kit: 1 - 30 m axis length

LR straightness These optics can be used to measure the horizontal straightness error in linear axes from 1 m up to 30 m in length when using the XL-80 laser system. They also enable measurement for parallelism of axes.

Each long range straightness kit contains:

1 straightness interferometer
1 straightness retroreflector
2 alignment targets

Part number	Description
A-8003-0444	Straightness optics - long range

Specification

Axial range	1 m - 30 m (40 in - 1200 in)
Straightness measurement range	±2.5 mm (± 0.1 in)
Accuracy*	±2.5% ±5 ±0.015M² µm (±2.5% ±200 ±0.05F² µin)
Resolution	0.1 µm (10 µin)

Where:
% = percentage of displayed value
M = measuring distance in metres
F = measuring distance in feet

* subject to environmental conditions

May require Universal (straightness) shutter or straightness accessory kit, depending upon application (see optics accessories section)

Squareness measurement optics

These optics Squareness measurement optic determine the out-of-squareness of two nominally orthogonal axes, by comparing their straightness slope values which are referenced via the optical square.

Note:
A straightness measurement optics kit and straightness accessory kit are also required to perform squareness measurements.

Each squareness measurement optics kit contains:

1 optical square and clamp screws
1 bracket (for adjustable turning mirror)

Part number	Description
A-8003-0665	Squareness measurement optics

Specification

Range	±3/M mm/m (±2000/F arc sec)
Resolution	0.01 µm/m (0.01 arc sec)

Where:
M = measurement distance in metres
F = measurement distance in feet

Flatness measurement kit

Flatness optics The flatness mirrors not only rotate horizontally, but also tilt to allow horizontal and vertical adjustment of the laser beam.

Note:
Angular optics are also required to perform flatness measurements.

Each flatness measurement kit contains:

2 flatness mirrors
1 50 mm flatness base
1 100 mm flatness base
1 150 mm flatness base

Part number	Description
A-8003-0442	Flatness measurement kit

Specification

Axial range	0 m - 15 m
Flatness measurement range	±1.5 mm (±0.06 in)
Accuracy	±0.6%* ±0.02M² µm (±0.6%* ±0.08F² µin)
Resolution	0.01 µm (1 µin)

Where:
% = percentage of calculated flatness
M = length of diagonal in metres
F = length of diagonal in feet

英國雷尼紹新型XL-80激光干涉儀

英國雷尼紹新型XL-80激光干涉儀詳細(xì)介紹：

    在超精密的測量和校準(zhǔn)方面，激光干涉儀已經(jīng)扮演多年極重要的角色。但是近年來隨著自動(dòng)化運(yùn)動(dòng)系統(tǒng)性能大幅提高，面對半導(dǎo)體和傳統(tǒng)金屬加工業(yè)的需求，現(xiàn)有激光系統(tǒng)的性能已無法滿足一些客戶的要求。
     Renishaw的新型XL-80激光干涉儀能夠滿足和超越實(shí)際工業(yè)規(guī)范水平，提供4m/s的測量速度和50kHz記錄速率。即使在的數(shù)據(jù)記錄速率下，系統(tǒng)準(zhǔn)確性可達(dá)到±0.5ppm（線性模式）和1納米的分辨率，這些改進(jìn)意味著工程師仍能使用可溯源性激光干涉的優(yōu)勢，幫助解決現(xiàn)代化機(jī)器設(shè)計(jì)問題。
     系統(tǒng)精度比原有的對應(yīng)產(chǎn)品ML10激光系統(tǒng)有所提升，在整個(gè)日常溫度、氣壓和濕度不同工作環(huán)境下，均可達(dá)到±0.5ppm的精度。環(huán)境讀數(shù)使用XC-80智能傳感系統(tǒng)進(jìn)行讀取，每7秒更新一次激光讀數(shù)補(bǔ)償值。還有一點(diǎn)很重要，與Renishaw的ML10系統(tǒng)一樣，所有測量值均采用穩(wěn)定的氦氖激光源的波長為基準(zhǔn)，保證能夠溯源至國際的長度標(biāo)準(zhǔn)。
     此新系統(tǒng)可以與現(xiàn)有的ML10系統(tǒng)光學(xué)鏡組兼容，使目前數(shù)千ML10用戶能夠升級到新系統(tǒng)，并同時(shí)保留其在光學(xué)鏡組、程序和人員培訓(xùn)上的原有投資。
     我們還提供已更新的Renishaw軟件版本（LaserXL?及QuickViewXL?），能夠以用戶熟悉的、易于使用的格式提供數(shù)據(jù)。LaserXL?能夠執(zhí)行循序漸進(jìn)式的測量，以方便對大多數(shù)機(jī)床按標(biāo)準(zhǔn)進(jìn)行檢驗(yàn)，QuickViewXL?軟件能夠在屏幕上實(shí)時(shí)地顯示激光讀數(shù)。
     您只要看一眼Renishaw的新型XL-80激光裝置和XC-80補(bǔ)償器，就會注意到它們比原有的ML10和EC10小了許多。現(xiàn)在，二者總重僅3公斤多一點(diǎn)（包括連接電纜、電源和傳感器），比原來減輕了70%。當(dāng)然，隨著激光頭和補(bǔ)償器尺寸減小，其他系統(tǒng)組件，例如三腳架和云臺也相應(yīng)地減小以便相配，因此整個(gè)系統(tǒng)（除了三腳架）的裝運(yùn)箱減小了許多?，F(xiàn)在，最小的“腳輪箱"只有原來箱子的一半大一點(diǎn)點(diǎn)，卻可以攜帶整個(gè)線性和角度測量系統(tǒng)，并有放置RenishawQC10球桿儀組件的位置。這個(gè)高度便攜的“檢查和修正"系統(tǒng)總重不到15公斤，同類產(chǎn)品無以匹敵。
     為了與系統(tǒng)的其他組件的便攜性相匹配，我們設(shè)計(jì)了新型三腳架和裝運(yùn)箱，僅重6.2公斤。
     激光頭和云臺體積很小，能夠方便地固定在標(biāo)準(zhǔn)磁性座上，可以在不方便使用三腳架固定的應(yīng)用條件下使用。XL-80激光測量系統(tǒng)的光束高度和光學(xué)鏡組尺寸與ML10系統(tǒng)一樣，因此也可以直接放在花崗巖工作臺（不使用三腳架云臺）上，進(jìn)行坐標(biāo)測量機(jī)的校準(zhǔn)。
    Renishaw已將激光的預(yù)熱時(shí)間縮短至大約僅6分鐘。預(yù)熱速度較同類系統(tǒng)快，因此用戶等待時(shí)間減少了，用于測量工作的幾率增加了，這對于機(jī)器校準(zhǔn)服務(wù)商和那些需要在一個(gè)地點(diǎn)執(zhí)行多項(xiàng)測量的用戶而言非常重要。
     現(xiàn)在，信號增益的開啟和關(guān)閉是一項(xiàng)標(biāo)準(zhǔn)功能，使其具有80米線性測量距離的能力。若短距離應(yīng)用時(shí)，則可以提高信號強(qiáng)度。激光信號通過USB連線直接輸出到電腦上（無需單獨(dú)的接口），輔助功能端口可提供模擬信號及工廠按需設(shè)定的數(shù)字信號輸出。
    　　XL-80激光頭的配置集原ML10G/Q/X多種任選功能于一體，功能更完善。
     XL-80系統(tǒng)具有長達(dá)3年標(biāo)準(zhǔn)的全面保修，并可以以優(yōu)惠的價(jià)格選購延長保修時(shí)間為5年。對于使用ML10的老用戶和使用其他廠商制造的同類系統(tǒng)的新客戶，我們均提供一些特別優(yōu)惠政策。